Download Diamond Chemical Vapor Deposition. Nucleation and Early by Huimin Liu PDF

By Huimin Liu

Content material:

, Pages vii-viii
1 - basic Introduction

, Pages 1-7
2 - Atomic and Crystal constructions of Diamond

, Pages 8-13
3 - Diamond CVD Techniques

, Pages 14-45
4 - Diamond Nucleation Mechanisms

, Pages 46-78
5 - Diamond Epitaxy, orientated progress, and Morphology Evolution

, Pages 79-91
6 - results of floor stipulations on Diamond Nucleation

, Pages 92-130
7 - results of Deposition stipulations on Diamond Nucleation

, Pages 131-142
8 - Theoretical and Modeling experiences on Diamond Nucleation

, Pages 143-159

, Pages 160-182

, Pages 183-195

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Additional info for Diamond Chemical Vapor Deposition. Nucleation and Early Growth Stages

Example text

The high energy electrons collide with the gas molecules, leading to the activation of the gas phase. The RF PACVD is more likely to produce diamond-like carbon (DLC) rather than pure diamond. 1 urn h-l) are also a drawback of this method, in spite of the potential of scale-up to large deposition areas (Table 1). 4 Direct-Current Thermal Plasma CVD A common DC glow discharge PACVD system may be varied by operating the plasma at higher pressures and powers at which a DC arc discharge between the electrodes can be produced.

The particles formed exhibit crystalline shapes and are a mixture of polytypes of diamond, but mostly hexagonal. The particle diameter is on the order of 50 nm, and the largest particles are -200 nm in diameter. In another experiment,r21g1 a mixture of cubic and hexagonal diamond polytypes, lo-500 run in diameter, were produced by MW assisted combustion of acetylene in oxygen. 9 in diffusion flame, and 50-500 torr. 83-l). The effect ofthe pressure on the particle size was attributed to its influence on nucleation density, growth rate, and reaction time.

Such graphite precursors, as described in hydrocarbon flame and combustion literature,[2271-[2301are stable in the high temperature reducing atmosphere of diamond CVD. 1881[231] On the contrary, Frenklach and Wang,rs7] in a detailed chemical kinetics modeling of a HFCVD reactor, found that under the operating conditions typical for diamond deposition, atomic hydrogen suppresses the formation of such aromatics. Diamond Nucleation Mechanisms 49 Mitura[2181 reported the formation of diamond particles from the decomposition of methane diluted by hydrogen, nitrogen, or argon in RF electric field.

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